Reliability and safety at the heart of gas engineering in the Fab
Manufacturers in the electronics industry need premium equipment and installations to support their processes and assure the proper supply, storage, application and use of electronic materials (also called precursor molecules). An expert in the production and supply of gases, process chemicals and liquid precursors for electronics, Air Liquide offers the right equipment, uncompromised safety, best-in-class reliability, and greater all-round control.
Air Liquide has expertise providing the delivery systems, gas cabinets, valve manifold boxes, chemical and slurry blend and dispense systems, as well as exhaust treatment systems, to assure that customer processes are safe, clean and efficient.
Six equipment manufacturing sites located close to our customers' plants
We supply and install gas and chemical dispense equipment for new manufacturing facilities, and support the turnkey installation of ultrapure gas and chemical distribution networks. We also provide central control and monitoring systems.
To date, we have supplied and installed over 10,000 gas cabinets, 10,000 chemical management systems, 500 precursor delivery systems, 100 bulk cryogenic purifiers and 50 online continuous quality control systems around the world.
Our 6 equipment manufacturing sites and installation teams are present at strategic global sites in close proximity to semiconductors, photovoltaic cells and flat panel display fabrication plants.
Innovations for delivery of electronics materials
Discover our equipment and turnkey engineering solutions for chemical and gas distribution and purification systems.
FabStream™ gas cabinets for the completely automated, fully redundant supply of specialty materials in cylinders
FabStream™ AVP (all vapor phase) for optimized distribution of liquefied specialty materials, with patented technology ensuring 100% vapor phase delivery of liquified electronics specialty materials at desired flow rates
FabStream™ bulk delivery system for completely automated and fully redundant distribution of electronics advanced materials like hydrogen chloride, silane, and nitrous oxide at very high flow rates
SaFlow™ gas cabinets for cost-effective distribution of electronics specialty materials in cylinders
SaFlow™ HI for cost-effective distribution of specialty materials in ton tanks and bundles
CANDI™ and AQUARIUS™ liquid precursors distribution equipments designed for easy operation and maintenance
ChemFlex™ for the distribution of aqueous and solvent chemicals from a highly reliable and configurable platform
ChemFlex™ CMP for the precise blending and automated distribution of chemical-mechanical polishing slurries
ChemPrep™ for the precise blending of high-purity chemicals