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Equipment
& Installations
Reliability and safety at the heart of gas engineering in the Fab
gas cabinets installed
precursor delivery systems installed
chemical management systems installed
Thousands of installations around the world
For manufacturers of semiconductors, photovoltaic cells, and flat panel displays, the safe and reliable supply of process fluids is of paramount concern.
Air Liquide has expertise providing the delivery systems, gas cabinets, valve manifold boxes, chemical and slurry blend and dispense systems, as well as exhaust treatment systems, to assure that customer processes are safe, clean and efficient.
Six equipment manufacturing sites located close to our customers' plants
We supply and install gas and chemical dispense equipment for new manufacturing facilities, and support the turnkey installation of ultrapure gas and chemical distribution networks. We also provide central control and monitoring systems.
To date, we have supplied and installed over 10,000 gas cabinets, 10,000 chemical management systems, 500 precursor delivery systems, 100 bulk cryogenic purifiers and 50 online continuous quality control systems around the world.
Our 6 equipment manufacturing sites and installation teams are present at strategic global sites in close proximity to semiconductors, photovoltaic cells and flat panel display fabrication plants.
Contact
Phone: +1 952-917-5100