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Balazs™ offers a wide-range of services to many industries. ISO 17025 and 9000:2008 accredited laboratories provide absolute quality control of processes and results. From research and development of new techniques, equipment usage and chemistries to providing routine analyses for existing production processes, Balazs™ is a leader in supporting technological advancement.
On-site laboratories |
Balazs™ has developed services to establish on-site laboratories at client locations. The benefit to the customer is an overall lower cost of ownership for the laboratory. |
Laboratories and qualified personnel are expensive. Outsourcing existing laboratories or creating on-site laboratories operated by Balazs™ is a win-win scenario.
Client benefits include:
Balazs™ benefits include:
Consulting services |
The strongest asset of Balazs™ is its people. With over 30 years of trace level contamination and source identification data and experience, our experts are on your side to assess, conduct, analyze and evaluate your data. |
Analytical Services, contamination control, laboratories. Each of these words conjures up a variety of thoughts, fears and reactions.
Often, as a process engineer, facilities managers or quality representative, the complexity of these terms may be overwhelming.
Balazs™ understands and is aligned to provide individual attention to each customer.
Whether it is providing root cause analysis with on-site expertise or determining what testing is needed, Balazs™ has the experience of working around the world in a number of facilities in order to address your needs.
Process tool cleanliness evaluation |
Balazs™ offers non-destructive test methods to characterize the surface cleanliness of tool parts, components and assemblies. Our experience with measuring parts cleanliness extends over 20 years. |
Sample Types
Tool Part, Component and Assembly
Cleaning Process Evaluation
Analyses Provided
Techniques
Sampling
Analytical
RoHS, WEEE and REACH compliance |
Restriction of Hazardous Substances; Waste Electrical and Electronic Equipment Directive; Registration, Evaluation and Authorization of Chemicals |
Balazs™ Offers Compliance Analysis for
Analyses Provided
Techniques
Mechanical sample preparation
Chemical sample preparation
Screening
Verification Procedures
Film characterization |
Thin film characterization is one of many core technologies at Balazs™. |
Typical Films Analyzed
Semiconductor and Disk Drive
Photovoltaic and Solar
Analyses Provided
Analytical Techniques
Gas testing |
Balazs™ tackles challenging gas analysis problems by taking advantage of its unique combination of reactive gas handling knowledge, ultra-pure chemicals, and world-class analytical facilities. |
From straightforward compressed gas analysis, to air sampling, to customized wet-chemical digestion schemes, Balazs™ focuses resources of the world’s largest industrial gas company on your problems.
Typical Gases Analyzed
Analyses Provided
Lithography Concerns
In order to maintain full warranty coverage for steppers, manufacturers require tool owners to meet explicit air and purge gas contamination specifications. Additionally, periodic analyses of refractory compounds are also required. In order to fulfill these requirements, Balazs offers stepper/scanners environment analyses to meet ITRS and OEM requirements.
Chemical testing |
Chemical characterization is critical for incoming quality control, at the point of distribution (POD), and at the point of use (POU) to ensure that chemical species and/or contamination is at a proper concentration for semiconductor process steps. |
Sample Types
Analyses Provided
Techniques
Analytical
Slurry off-line testing solutions
Bulk material testing |
Solid bulk materials can be evaluated at Balazs™ in three dimensions at both compositional and trace levels. |
The materials can be in the forms of ingot, wafer, coupon, chunk, small electric device, wire, or powder. Since 1975 We have experience characterizing a variety of bulk materials, both inorganic and organic in nature, for semiconductor, photovoltaic, disk drive, nanotech, defense, and biomedical industries.
Provide testing for
Applications
Analytical Metrology
Water testing |
Balazs™ is an industry leader for Ultrapure Water Analyses. |
In addition, Balazs™ provides a wide variety of analytical services to ensure your water system quality remains consistently high purity. Key industries Balazs™ supports are semiconductor/electronics, pharmaceutical, nuclear power, solar and medical.
Sample Types
• Semiconductor
• Photovoltaic
• Power industry
• Bio-medical industry
Analyses and Services Provided
Analyses
• Total Oxidizable Carbon (TOC)
• Semivolatile Organics
• Resin Amines
• Trihalomethanes
• Organic Acids
• Urea
• Dissolved Silica
• Total Silica
• Colloidal
Analytical Techniques
Industry Guidelines
Cleanroom evaluation |
Balazs™ is recognized as a world leader in cleanroom contamination control and reduction. |
Balazs™ participates in ITRS committees and offer its expertise to advance cleanroom materials and technologies. Balazs™ remains at the leading edge through innovative methodology development for lower detection limits.
Analyses for:
Sample Types and Techniques
Cleanroom Surfaces and Equipment Contamination
Material and Components Analyses
Cleanroom Air Analysis and Witness Wafers
Material and component evaluation |
Materials and components used throughout the fab are potential sources of contamination. |
Balazs™ expertise will allow you to determine actual levels of cleanliness and whether a material or component can introduce unwanted contamination.
Sample Types
Analyses Provided
Techniques
Sampling
Analytical
Airborne and surface molecular contamination identification |
Balazs™ provides technical expertise in identifying and controlling Airborne Molecular Contamination (AMC) and Surface Molecular Contamination (SMC) |
Sample Types
Analyses and Services Provided
Analyses
Services
Techniques
Sampling
Analytical
Lithography Concerns
Balazs is a qualified laboratory for leading OEMs. Our collaboration has led to improved specifications for optimizing optics performance and stepper environment control thereby extending the lifetime of the tool.
Selective Issues
Recommended Tests
Industry Guidelines
Wafer testing |
We offer analytical characterization of wafers that is the building block of many device technologies. |
Our experience extends to depth profiling of engineered substrates such as strained silicon, SOI, specific multiple layer epi structures and graded layers. Balazs™ offers surface sensitive techniques for front end processing (FEP) wafer cleanliness and surface preparation evaluation - both are key prerequisites for high yield device production.
Sample Types
• Bare
• Oxide
• BPSG
• SiN
• GaAs
• Other
Analyses Provided
Applications
Techniques
ESD and corona air ionizer tip deposit analysis |
We provide both sampling kits as well as analytical services to identify elements and compounds present in air ionizer tip deposits, which have formed as a result of the air ionizers reacting with Airborne Molecular Contamination (AMC) in cleanroom air. |
With tip deposit identification, Balazs™ is able to help identify elements that aids pinpointing the AMC source, leading to the elimination/control of AMC. Such sampling and analyses can improve ionizer performance, reduce particulation and decrease risk to wafers, optics, reticles and scanners.
Sampling Methods
Sampling Kit(s) Offered
Analytical Techniques